Control of reactive plasmas in a multicusp plasma source equipped with a movable magnetic filter
作者:
Osamu Fukumasa,
Hiroshi Naitou,
Satoshi Sakiyama,
期刊:
Journal of Applied Physics
(AIP Available online 1993)
卷期:
Volume 74,
issue 2
页码: 848-852
ISSN:0021-8979
年代: 1993
DOI:10.1063/1.354876
出版商: AIP
数据来源: AIP
摘要:
With the use of both a movable magnetic filter and a plasma grid, plasma parameters (H2‐CH4or Ar‐CH4plasmas) are spatially well controlled. At any filter position, plasma parameters change steeply across the magnetic filter. Then, a plasma source is divided into the two parts, i.e., the source plasma region (high density plasma with energetic electrons) and the diffused plasma region (low density and low‐temperature plasma without energetic electrons). Plasma parameters in the diffused plasma are well controlled by changing the plasma grid potential. The role of the magnetic filter (i.e., preferential reflection of energetic electrons) is well clarified by computer simulation. The relation between plasma parameters and some species of neutral radicals is also briefly discussed.
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