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In situpatterning of contamination resists in metalorganic chemical vapor deposition for fabrication of quantum wires

 

作者: T. Takahashi,   Y. Arakawa,   M. Nishioka,  

 

期刊: Applied Physics Letters  (AIP Available online 1991)
卷期: Volume 58, issue 21  

页码: 2372-2374

 

ISSN:0003-6951

 

年代: 1991

 

DOI:10.1063/1.104874

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We demonstrated a novel selective growth technology for the fabrication of quantum microstructures utilizinginsitupatterning of contamination resist in the metalorganic chemical vapor deposition system. The results indicate that a GaAs quasi‐quantum wire structure, as narrow as 700 nm, can be successfully fabricated, showing that this technique may be applied to fabrication technologies for quantum microstructures.

 

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