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Properties of low-pressure chemical vapor epitaxial GaN films grown using hydrazoic acid (HN3)

 

作者: D. G. Chtchekine,   L. P. Fu,   G. D. Gilliland,   Y. Chen,   S. E. Ralph,   K. K. Bajaj,   Y. Bu,   M. C. Lin,   F. T. Bacalzo,   S. R. Stock,  

 

期刊: Journal of Applied Physics  (AIP Available online 1997)
卷期: Volume 81, issue 5  

页码: 2197-2207

 

ISSN:0021-8979

 

年代: 1997

 

DOI:10.1063/1.364253

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We have grown high-quality GaN films on sapphire using a new nitrogen precursor, hydrazoic acid (HN3). Films were grown at 600 °C on (0001) sapphire substrates in a low-pressure chemical-vapor-deposition system using triethylgallium and hydrazoic acid as precursors. Subsequently, we have conducted a complete study of the surface, structural, electrical, and optical properties of these GaN films, and our early results are very encouraging. All films were of wurtzite crystal structure, slightly polycrystalline, andntype at about 2×1017cm−3. We find the films to be efficient light emitters in the near-band edge region of the spectrum. Analysis of the emission energies and kinetics suggests that the midgap emission results from a superimposed deep-donor-to-shallow-acceptor emission and a deep-donor-to-valence-band emission, where the deep donor consists of a distribution of energy levels, thereby yielding a broad emission band. ©1997 American Institute of Physics.

 

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