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Influence of the ratio of the electron temperatures at the electrodes on the current oscillations in a radio‐frequency plasma reactor

 

作者: R. Deutsch,   U. Erz,   M. Pohle,   E. Räuchle,   J. Schwarz,  

 

期刊: Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films  （AIP Available online 1994）
卷期: Volume 12, issue 5  

页码: 2936-2937

 

ISSN:0734-2101

 

年代: 1994

 

DOI:10.1116/1.578970

 

出版商: American Vacuum Society

 

关键词: PLASMA SOURCES;HIGH−FREQUENCY DISCHARGES;ELECTRIC CURRENTS;OSCILLATIONS;PLASMA SHEATH;ELECTRODES;EQUIVALENT CIRCUITS;ELECTRON DENSITY;ELECTRON TEMPERATURE

 

数据来源: AIP

 

摘要:

Based on electric circuits for radio‐frequency plasma reactors it is shown numerically that not only the mean electron density and the mean electron temperature can be determined from the discharge current as described in R. J. Seeböck, R. Deutsch, and E. Räuchle, J. Vac. Sci. Technol. A11, 682 (1993), but also the ratio of the mean electron temperatures in the electrode boundary sheaths can be estimated.  

 

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