首页
按字顺浏览
期刊浏览
卷期浏览
Superconducting properties, electrical resistivities, and structure of NbN thin films
|
Superconducting properties, electrical resistivities, and structure of NbN thin films
作者:
Y. M. Shy,
L. E. Toth,
R. Somasundaram,
期刊:
Journal of Applied Physics
(AIP Available online 1973)
卷期:
Volume 44,
issue 12
页码: 5539-5545
ISSN:0021-8979
年代: 1973
DOI:10.1063/1.1662193
出版商: AIP
数据来源: AIP
摘要:
Superconducting properties and electrical resistivities of NbN thin films have been studied as a function of sputtering parameters, film structure, and composition. A good correlation exists between superconductingTc's and film structure and composition regardless of the sputtering conditions used to achieve this structure. The most important parameters affectingTcare lattice parameter, crystal structure, island structure, and impurity content. Substrate temperature, Ar/N2ratio, and impurity content are the principal sputtering parameters affecting film structure, and thusTc.
点击下载:
PDF
(591KB)
返 回
|
|