Large capacity As2source for molecular beam epitaxy
作者:
T. Henderson,
W. Kopp,
R. Fischer,
J. Klem,
H. Morkoc¸,
L. P. Erickson,
P. W. Palmberg,
期刊:
Review of Scientific Instruments
(AIP Available online 1984)
卷期:
Volume 55,
issue 11
页码: 1763-1766
ISSN:0034-6748
年代: 1984
DOI:10.1063/1.1137654
出版商: AIP
数据来源: AIP
摘要:
Molecular beam epitaxy (MBE) is a crystal growth technique capable of growing ultrathin layered heterostructures for basic studies, and devices such as modulation doped field‐effect transistors (MODFET’s), heterojunction lasers, heterojunction bipolar transistors (HBT’s), and superlattices. By using a dimeric arsenic source to grow GaAs and AlGaAs layers, the crystalline quality of these devices and structures may be improved, ultimately improving device performance. The design of a novel large capacity effusion cell (capable of producing about 700 &mgr;m GaAs growth) for cracking tetrameric arsenic into dimeric arsenic and the results of its use are described.
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