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Direct deposition of SrBi2Ta2O9Film on IrO2electrode using liquid source CVD method

 

作者: Takashi Eshita,   Hideki Yamawaki,   Shinji Miyagaki,   Yoshihiro Arimoto,  

 

期刊: Integrated Ferroelectrics  （Taylor Available online 1999）
卷期: Volume 26, issue 1-4  

页码: 103-108

 

ISSN:1058-4587

 

年代: 1999

 

DOI:10.1080/10584589908215615

 

出版商: Taylor & Francis Group

 

关键词: SrBi2Ta2O9;SBT;LS-CVD;IrO2

 

数据来源: Taylor

 

摘要:

SrBi2Ta2O9(SBT) thin films were directly deposited on IrO2electrode using liquid source CVD (LS-CVD) method. Bi deficient region in the SBT films, which existed near the conventional Pt bottom electrode, was successfully eliminated using IrO2bottom electrode. X-ray diffraction analysis showed our SBT films on IrO2have good crystalline quality. Satisfactory electric properties (6 μC/cm2of 2Pr and 10−6A/cm2of leakage current) were obtained

 

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