Correction for chromatic aberration in microscope projection photolithography
作者:
M. J. Brady,
A. Davidson,
期刊:
Review of Scientific Instruments
(AIP Available online 1983)
卷期:
Volume 54,
issue 10
页码: 1292-1295
ISSN:0034-6748
年代: 1983
DOI:10.1063/1.1137239
出版商: AIP
数据来源: AIP
摘要:
We have measured the ultraviolet dispersion of several microscope objectives and we find that all of them are limited by axial chromatic aberration when used for polychromatic exposure of photoresist. We show how to measure and correct for the ultraviolet focus shift, and estimate the corrected resolution. Certain lenses are able to produce micron features over millimeter fields.
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