A computer solution for the design of multipumped vacuum systems
作者:
D. J. Santeler,
期刊:
Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films
(AIP Available online 1991)
卷期:
Volume 9,
issue 3
页码: 2066-2069
ISSN:0734-2101
年代: 1991
DOI:10.1116/1.577414
出版商: American Vacuum Society
关键词: VACUUM SYSTEMS;DESIGN;VACUUM PUMPS;PERSONAL COMPUTERS;FLOW RATE;GAS FLOW;COMPUTERIZED SIMULATION
数据来源: AIP
摘要:
This paper continues the development of the use of personal computers to design vacuum systems by determining the gas flow through the system as a function of the system pressures. Previous papers have presented a compatible set of short‐tube gas‐flow equations for circular tubes for all pressures from atmosphere to high vacuum1and a computer methodology for combining components in a series arrangement to obtained a complete system design.2Some of the problems of parallel pumped systems are discussed in the present paper and a general outline is presented for their computer solution. The additional data on transmission probabilities through short rectangular tubes which was presented at the 1990 National AVS meeting as a part of this paper has been removed and is to be published separately.
点击下载:
PDF
(321KB)
返 回