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A computer solution for the design of multipumped vacuum systems

 

作者: D. J. Santeler,  

 

期刊: Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films  (AIP Available online 1991)
卷期: Volume 9, issue 3  

页码: 2066-2069

 

ISSN:0734-2101

 

年代: 1991

 

DOI:10.1116/1.577414

 

出版商: American Vacuum Society

 

关键词: VACUUM SYSTEMS;DESIGN;VACUUM PUMPS;PERSONAL COMPUTERS;FLOW RATE;GAS FLOW;COMPUTERIZED SIMULATION

 

数据来源: AIP

 

摘要:

This paper continues the development of the use of personal computers to design vacuum systems by determining the gas flow through the system as a function of the system pressures. Previous papers have presented a compatible set of short‐tube gas‐flow equations for circular tubes for all pressures from atmosphere to high vacuum1and a computer methodology for combining components in a series arrangement to obtained a complete system design.2Some of the problems of parallel pumped systems are discussed in the present paper and a general outline is presented for their computer solution. The additional data on transmission probabilities through short rectangular tubes which was presented at the 1990 National AVS meeting as a part of this paper has been removed and is to be published separately.

 

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