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An Improved Ion Thinning Apparatus

 

作者: A. H. Heuer,   R. F. Firestone,   J. D. Snow,   H. W. Green,   R. G. Howe,   J. M. Christie,  

 

期刊: Review of Scientific Instruments  （AIP Available online 1971）
卷期: Volume 42, issue 8  

页码: 1177-1184

 

ISSN:0034-6748

 

年代: 1971

 

DOI:10.1063/1.1685337

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Details of an improved ion thinning apparatus, suitable for preparing electron microscope foils of inorganic nonmetallic samples (ceramics, minerals, rocks), are described, along with a resume of conditions for its optimum operation. Problems of surface topography and radiation damage associated with the ion thinning process are also briefly discussed.

 

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