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The effect of implantation temperature on the surface hardness, elastic modulus and Raman scattering in amorphous carbon

 

作者: Deok-Hyung Lee,   Hyukjae Lee,   Byungwoo Park,   David B. Poker,   Laura Riester,  

 

期刊: Applied Physics Letters  (AIP Available online 1997)
卷期: Volume 70, issue 23  

页码: 3104-3106

 

ISSN:0003-6951

 

年代: 1997

 

DOI:10.1063/1.119092

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Nitrogen implantation into amorphous carbon has been studied at various implantation temperatures by using 100 keVN+at 5&mgr;A and fluences of2×1017ions/cm2. The apparent surface hardness and elastic modulus from nanoindentation are well correlated with an asymmetric diffuse peak at around 1500cm−1and a broad band at∼700cm−1in the Raman spectra. Both the enhanced strengths and Raman characteristics show very weak Arrhenius-type implantation-temperature dependence with activation enthalpies of approximately 20 meV in the temperature range 223−1073 K. ©1997 American Institute of Physics.

 

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