The effect of implantation temperature on the surface hardness, elastic modulus and Raman scattering in amorphous carbon
作者:
Deok-Hyung Lee,
Hyukjae Lee,
Byungwoo Park,
David B. Poker,
Laura Riester,
期刊:
Applied Physics Letters
(AIP Available online 1997)
卷期:
Volume 70,
issue 23
页码: 3104-3106
ISSN:0003-6951
年代: 1997
DOI:10.1063/1.119092
出版商: AIP
数据来源: AIP
摘要:
Nitrogen implantation into amorphous carbon has been studied at various implantation temperatures by using 100 keVN+at 5&mgr;A and fluences of2×1017ions/cm2. The apparent surface hardness and elastic modulus from nanoindentation are well correlated with an asymmetric diffuse peak at around 1500cm−1and a broad band at∼700cm−1in the Raman spectra. Both the enhanced strengths and Raman characteristics show very weak Arrhenius-type implantation-temperature dependence with activation enthalpies of approximately 20 meV in the temperature range 223−1073 K. ©1997 American Institute of Physics.
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