Advanced electron cyclotron resonance plasma etching technology for precise ultra‐large‐scale integration patterning
作者:
Seiji Samukawa,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1994)
卷期:
Volume 12,
issue 1
页码: 112-115
ISSN:1071-1023
年代: 1994
DOI:10.1116/1.587166
出版商: American Vacuum Society
关键词: ETCHING;PLASMA JETS;ELECTRON CYCLOTRON−RESONANCE;VLSI;SPATIAL RESOLUTION;FABRICATION;SILICON;MAGNETIC FIELDS;MICROWAVE RADIATION;PLASMA INSTABILITY;Si
数据来源: AIP
摘要:
Ultra‐large‐scale integration patterning with less than 0.25‐μm precision requires the optimization of electron cyclotron resonance (ECR) plasma discharge. This is because ion motion and etching results are affected by magnetohydrodynamic plasma instability and charge accumulation on the substrate in nonuniform plasma. Microloading and unusual notching at the boundary pattern between dense patterns and open spaces are both caused duringn+poly‐Si etching in nonuniform plasma. To prevent these problems, optimally uniform ECR plasma generation is necessary. This is accomplished by optimizing both the magnetic field profile and the introduction of microwaves.
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