We observed an anomalous temperature effect for poly(cyclohexylmethylsilane) (PHMS) in a systematic study on formation of electrically oriented polysilane films by casting on interdigital electrodes to which a dc voltage is applied. The orientation of PHMS is quite sensitive to the process temperature: polysilanes align well along the electric field at 14 °C but do not at temperatures higher than 15 °C or lower than 11 °C. It is also shown that the degree of orientation of polysilanes in the films reflects to the electric conduction. ©1995 American Institute of Physics.