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Stoichiometric analysis of a barium strontium titanate film by heavy ion recoil spectrometry

 

作者: W.B. Stannard,   P.N. Johnston,   S.R. Walker,   I.F. Bubb,   J.F. Scott,   D.D. Cohen,   N. Dytlewski,   J.W. Martin,  

 

期刊: Integrated Ferroelectrics  （Taylor Available online 1995）
卷期: Volume 9, issue 1-3  

页码: 243-250

 

ISSN:1058-4587

 

年代: 1995

 

DOI:10.1080/10584589508012929

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

Heavy ion recoil spectrometry employing 77 and 98 MeV127I ions has been used to analyse thin films of barium strontium titanate (BST) at the new heavy ion recoil facility at ANSTO, Lucas Heights. Depth profiles for all major elements and carbon have been obtained. Analysis reveals depletion of oxygen in the BST layer next to the platinum electrode and interdiffusion of strontium and oxygen through the layers.

 

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