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The Theoretical Resolution Limit of the Electron Microscope

 

作者: O. Scherzer,  

 

期刊: Journal of Applied Physics  (AIP Available online 1949)
卷期: Volume 20, issue 1  

页码: 20-29

 

ISSN:0021-8979

 

年代: 1949

 

DOI:10.1063/1.1698233

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The resolving power of the electron microscope and the contrast in the image are calculated for different conditions of focusing, illumination and aperture. These conditions can change the limit of resolution by a factor of about 3. The contrast in the image of an atom is appreciably increased by defocusing and spherical aberration. Nevertheless, the contrast improves when the numerical value of the aberration constant is diminished. The effect of different methods of spherical correction is discussed briefly.

 

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