Visible photoluminescence from hydrogenated silicon particles suspended in a silane plasma
作者:
C. Courteille,
J.‐L. Dorier,
J. Dutta,
Ch. Hollenstein,
A. A. Howling,
T. Stoto,
期刊:
Journal of Applied Physics
(AIP Available online 1995)
卷期:
Volume 78,
issue 1
页码: 61-66
ISSN:0021-8979
年代: 1995
DOI:10.1063/1.360582
出版商: AIP
数据来源: AIP
摘要:
Visible photoluminescence at room temperature has been observed in amorphous hydrogenated silicon particulates during their formation in a silane radio‐frequency plasma. Oxygen injection along with mass spectrometry measurements demonstrate that oxygen has no influence on the photoluminescence. The appearance of visible photoluminescence coincides with a particle agglomeration phase as shown by laser light scattering experiments, and electron microscopy shows silicon nanocrystals within these particulates. These observations of visible photoluminescence are consistent with the model of quantum confinement in the silicon nanocrystals. ©1995 American Institute of Physics.
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