Formation of bubbles in BF+2‐implanted silicon
作者:
C. W. Nieh,
L. J. Chen,
期刊:
Applied Physics Letters
(AIP Available online 1986)
卷期:
Volume 48,
issue 22
页码: 1528-1530
ISSN:0003-6951
年代: 1986
DOI:10.1063/1.96857
出版商: AIP
数据来源: AIP
摘要:
Fluorine bubbles were observed in 5×1015/cm2BF+2‐implanted (001) and (111) Si annealed at 1000–1100 °C. Bubbles were found to form in samples annealed at 1100 °C for a time as short as 10 s. The bubbles were distributed mostly near the original amorphous/crystalline interface and silicon surface. The growth of bubbles was seen to be intimately related to the presence of residual defects. Possible ramifications of bubble formation in device applications are discussed.
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