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Overview of coating technologies for large scale metallurgical, optical, and electronic applications

 

作者: R. F. Bunshah,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena  （AIP Available online 1984）
卷期: Volume 2, issue 4  

页码: 789-799

 

ISSN:0734-211X

 

年代: 1984

 

DOI:10.1116/1.582880

 

出版商: American Vacuum Society

 

关键词: SURFACE COATING;REVIEWS;USES;MORPHOLOGY;INTEGRATED CIRCUITS;COATINGS;SUBSTRATES;DEPOSITION;THIN FILMS

 

数据来源: AIP

 

摘要:

There are hardly any high technology applications which do not involve composite materials with a coating of specific properties on a substrate with another set of properties. This overview is concerned with the various coating methods for a variety of substrates for metallurgical, optical, and electronic applications. Selection criteria for process/apparatus for large scale applications are presented. Economic considerations are discussed.

 

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