首页   按字顺浏览 期刊浏览 卷期浏览 Direct imaging of Si incorporation in GaAs masklessly grown on patterned Si substrates
Direct imaging of Si incorporation in GaAs masklessly grown on patterned Si substrates

 

作者: M. Grundmann,   J. Christen,   D. Bimberg,   A. Hashimoto,   T. Fukunaga,   N. Watanabe,  

 

期刊: Applied Physics Letters  (AIP Available online 1991)
卷期: Volume 58, issue 19  

页码: 2090-2092

 

ISSN:0003-6951

 

年代: 1991

 

DOI:10.1063/1.105020

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The lateral variation of the emission energy of GaAs masklessly grown on V‐grooved Si is imaged with cathodoluminescence wavelength imaging. This newly developed unique experimental approach allows, for the first time, to directly visualize and quantify the extreme homogeneity of this novel growth mode and the lateral variation of Si impurity incorporation in such semiconductor microstructures. It represents an essential characterization tool for micropatterned optoelectronic monolithic integrated circuits.

 

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