Direct imaging of Si incorporation in GaAs masklessly grown on patterned Si substrates
作者:
M. Grundmann,
J. Christen,
D. Bimberg,
A. Hashimoto,
T. Fukunaga,
N. Watanabe,
期刊:
Applied Physics Letters
(AIP Available online 1991)
卷期:
Volume 58,
issue 19
页码: 2090-2092
ISSN:0003-6951
年代: 1991
DOI:10.1063/1.105020
出版商: AIP
数据来源: AIP
摘要:
The lateral variation of the emission energy of GaAs masklessly grown on V‐grooved Si is imaged with cathodoluminescence wavelength imaging. This newly developed unique experimental approach allows, for the first time, to directly visualize and quantify the extreme homogeneity of this novel growth mode and the lateral variation of Si impurity incorporation in such semiconductor microstructures. It represents an essential characterization tool for micropatterned optoelectronic monolithic integrated circuits.
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