The formation of amorphous diamondlike films by deposition of energetic carbon atoms is modeled. Formation of diamondlike bonding is attributed to transient high pressure created by the ion impact. The relaxation to energetically favored graphitic state is assumed to proceed through succession of metastable states, taking place until the glass transition point is reached. The model illustrates from the new point of view the processes involved in the formation of diamondlike films. It predicts qualitatively similar dependence of film properties on the energy of the incoming carbon atoms as observed in experiments. ©1995 American Institute of Physics.