首页   按字顺浏览 期刊浏览 卷期浏览 Temperature Changes in Thin Metal Films during Vapor Deposition
Temperature Changes in Thin Metal Films during Vapor Deposition

 

作者: M. V. Belous,   C. M. Wayman,  

 

期刊: Journal of Applied Physics  (AIP Available online 1967)
卷期: Volume 38, issue 13  

页码: 5119-5124

 

ISSN:0021-8979

 

年代: 1967

 

DOI:10.1063/1.1709287

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The temperature increase in vacuum‐evaporated films of Au and Ag was measured by allowing the evaporant to condense on the junctions of Au‐Ni thin‐film thermocouples connected in series. The (minimum) average film temperature during growth was found to depend upon the evaporation rate and the substrate temperature. The average temperature of thin films of Au and Ag during deposition can be some 400°–500°K higher than the substrate temperature; this increase is attributed to the exothermic heat of condensation and radiation heating from the evaporation source. Even at low substrate temperatures near 100°K, the average film temperature can approach 500°K. The significant temperature existing in evaporated thin films can explain grain growth phenomena and other metallurgical changes in the structure of the films.

 

点击下载:  PDF (430KB)



返 回