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Phase‐modulated ellipsometer using a Fourier transform infrared spectrometer for real time applications

 

作者: A. Canillas,   E. Pascual,   B. Dre´villon,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1993)
卷期: Volume 64, issue 8  

页码: 2153-2159

 

ISSN:0034-6748

 

年代: 1993

 

DOI:10.1063/1.1143953

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A new Fourier transform infrared phase‐modulated ellipsometer is presented. It combines the high frequency provided by a photoelastic modulator (37 kHz) with the low frequency of the Fourier transform infrared spectroscopy (<1 kHz), by means of a numerical data acquisition system. A full spectrum recording (from 900 to 4000 cm−1) can be achieved in 2 s. Thus, it allows its adaptation for kineticinsitustudies. The optical setup and the data reduction procedure are presented. In particular, a self‐consistent spectral calibration procedure is described in detail. The precision in &PSgr; and &Dgr; increases from 0.3° to 0.02° when increasing the integration time from 2 to 760 s. The examples shown in this article illustrate the high sensitivity to identify and analyze the absorption vibration variations of ultrathin films (a few angstroms thick).

 

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