The dependence of the dissolution rates of phenolic resins on the base concentration of the developer can be described by a dimensionless equation based on a membrane model of novolak dissolution [J. P. Huang, T. K. Kwei, and A. Reiser, Macromolecules22, 4106 (1989) and R. A. Arcus, Proc. SPIE631, 124, (1986)]. The resin is characterized by a dissolution thresholdc0, which is a limiting base concentration below which dissolution no longer occurs, by a scaling exponentnand by a membrane permeabilityPrwhich refers to a developer of base concentrationc= 2c0. Under these reference conditions all resins are in a corresponding state and dissolve with the same dimensionless rate ofR/Pr= 0.5. The inhibition effect in an inhibitor/resin pair is represented by a plot of log(Ri/R0) against the inhibitor concentration in the resin matrix, whereRiis the rate of dissolution of the inhibited,R0the rate of dissolution of the pure resin. The slope of this plot is independent of the inhibitor concentration over a reasonable concentration range and may be termed the inhibition factor and used as a measure of the inherent inhibition capability of the inhibitor in the resin. It is termed the inhibition factor. It is suggested that inhibition factors be compared in conditions where the pure resins dissolve at the same rate. In this study we have chosen a rate of 15 μm/min as the standard condition.