A cascade diffusion pump system for an electron microscope
作者:
Nagamitsu Yoshimura,
Haruo Hirano,
Setsuo Norioka,
Terukazu Etoh,
期刊:
Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films
(AIP Available online 1984)
卷期:
Volume 2,
issue 1
页码: 61-67
ISSN:0734-2101
年代: 1984
DOI:10.1116/1.572627
出版商: American Vacuum Society
关键词: electron microscopes;vacuum pumps;design;operation;comparative evaluations;efficiency;pumping;high vacuum
数据来源: AIP
摘要:
Several DP systems have been discussed and evaluated with respect to dynamic evacuation under actual operating conditions of an electron microscope. As a result, a cascade DP system has been found to be the most reasonable for an electron microscope where the column is evacuated by the first DP backed by the second DP, and for the camera chamber by the second DP with a large volume foreline backed by a mechanical pump. A spectrum of the residual gases in an electron microscope with a cascade DP system indicates a very clean vacuum with hydrocarbon partial pressures of less than 3×10−7Pa.
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