Photoreflectance of AlxGa1−xAs and AlxGa1−xAs/GaAs interfaces and high‐electron‐mobility transistors
作者:
Michael Sydor,
Neal Jahren,
W. C. Mitchel,
W. V. Lampert,
T. W. Haas,
M. Y. Yen,
S. M. Mudare,
D. H. Tomich,
期刊:
Journal of Applied Physics
(AIP Available online 1990)
卷期:
Volume 67,
issue 12
页码: 7423-7429
ISSN:0021-8979
年代: 1990
DOI:10.1063/1.344532
出版商: AIP
数据来源: AIP
摘要:
Photoreflectance is used to measure AlxGa1−xAs composition, and to determine carrier concentrations in Si‐doped AlGaAs epilayers capped with GaAs. Undoped caps are generally depleted, and do not show a usual GaAs photoreflectance. However, photoreflectance from the cap/(doped AlGaAs) interface produces a broad signal which distorts the entire spectrum, making it hard to locate the GaAs and AlGaAs band edges precisely. A similar broad signal from modulation‐doped heterostructures is apparently associated with samples that show the presence of two‐dimensional electron gas.
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