Low-dispersion thin-film microstrip lines with cyclotene (benzocyclobutene) as dielectric medium
作者:
H.-M. Heiliger,
M. Nagel,
H. G. Roskos,
H. Kurz,
F. Schnieder,
W. Heinrich,
R. Hey,
K. Ploog,
期刊:
Applied Physics Letters
(AIP Available online 1997)
卷期:
Volume 70,
issue 17
页码: 2233-2235
ISSN:0003-6951
年代: 1997
DOI:10.1063/1.118849
出版商: AIP
数据来源: AIP
摘要:
We report on thin-film microstrip lines (TFMSLs) fabricated on low-resistivity Si with polymerized cyclotene as the dielectric between signal and ground conductor, all on top of the wafer. Electro-optic high-frequency characterization of the TFMSLs reveals negligible modal dispersion up to the highest frequencies of 1.0 THz. In spite of the high substrate conductivity, the attenuation is low(⩽1 dB/mm at 100 GHz). Over the full frequency range, it is dominated by conductor losses and not by absorption in the dielectric. With these dispersion and attenuation properties, TFMSLs are an attractive alternative to coplanar waveguides, with the additional advantage of immunity against substrate absorption and radiation losses. ©1997 American Institute of Physics.
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