Scanning secondary ion analytical microscopy with parallel detection
作者:
Georges Slodzian,
Bernard Daigne,
François Girard,
Fabrice Boust,
François Hillion,
期刊:
Biology of the Cell
(WILEY Available online 1992)
卷期:
Volume 74,
issue 1
页码: 43-50
ISSN:0248-4900
年代: 1992
DOI:10.1016/0248-4900(92)90007-N
出版商: Blackwell Publishing Ltd
关键词: secondary ion mass spectrometry;high resolution ion microscopy;parallel detection of different ionic species;high mass resolution spectrometer
数据来源: WILEY
摘要:
Summary—The secondary ion microscope described here allows to obtain the simultaneous registration of chemical and isotopic distribution maps of several elements composing the sample. The instrument has been specially designed to optimize both sensitivity and selectivity: bombardment with primary Cs+ions to increase the ionization yields of negative secondary ions, efficient collection of secondary ions at the target surface, matching of the secondary ion beam etendue with the acceptance of the mass spectrometer working at high mass resolution, spectrometer with parallel detection capabilities. The probe diameter can be made as low as 30 nm and ion induced electron images registered at the same time as ion images. Presently, four ion micrographs are obtained simultaneously over a field of view up to 20 × 20 μm2containing up to 512 × 512 pixels. Examples are shown with an ion probe diameter of 0.
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