Deposition of LiTaO3thin films on single crystal substrates by vapor phase hydrolysis of volatile LiTa(OC4H9)6precursor
作者: Kueir-Weei Chour, Ren Xu,
期刊:
Integrated Ferroelectrics
（Taylor Available online 1995）
页码: 85-92
ISSN:1058-4587
年代: 1995
DOI:10.1080/10584589508220223
出版商: Taylor & Francis Group
数据来源: Taylor
摘要: Epitaxial LiTaO3films were grown on single crystal substrates using a single molecular precursor, LiTa(OButn)6. The deposition is achieved by vaporphase hydrolysis-polycondensation reactions in a low pressure MOCVD reactor. Rocking curve of LiTaO3film grown on sapphire (0006) indicated high quality epitaxy. LiTa(OButi)6and LiTa(OButt)6precursors resulted in single phase β-Ta2O5films.
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