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A novel test structure for grating pitch determination with near‐Angstrom accuracy

 

作者: M. C. Peckerar,   K. W. Rhee,   P.‐T. Ho,   J. Goldhar,  

 

期刊: Journal of Applied Physics  （AIP Available online 1990）
卷期: Volume 68, issue 10  

页码: 5381-5382

 

ISSN:0021-8979

 

年代: 1990

 

DOI:10.1063/1.347039

 

出版商: AIP

 

数据来源: AIP

 

摘要:

This communication describes a novel double‐grating test structure which enables grating pitch‐difference determination with angstrom accuracy. Edge acuity can also be estimated. The test structure is easily fabricated and rapidly evaluated with inexpensive equipment generally found in microstructure laboratories.

 

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