The tribological properties of highly disordered graphitic carbon layers formed on silicon carbide (SiC) substrates by reaction with chlorine and chlorine-hydrogen gas mixtures at 1000 °C were studied. Si was selectively removed from the near surface of SiC by chlorine gas, leaving behind a layer of carbon having high structural density and strong bonding characteristics. Tribological tests showed that the carbon films were highly adherent and able to reduce friction coefficients of the base SiC by factors of up to seven. There was little or no change in the factional behavior of carbon layers when sliding velocity and load were increased. Low friction coefficients (∼0.1) could be obtained under wet, dry, polished, and rough conditions. The initially rough carbon surface underwent plastic flow producing a smooth, self-adjusting carbon layer. Structural morphology and the amount of disorder in the carbon layers were correlated with the friction and wear performance of the resultant films.Presented as a Society of Tribologists and Lubrication Engineers Paper at the ASME/STLE Tribology Conference in Seattle, Washington, October 1–4, 2000