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Investigation of orientation effect on contact resistance in selectively doped AlGaAs/GaAs heterostructures

 

作者: M. Kamada,   T. Suzuki,   F. Nakamura,   Y. Mori,   M. Arai,  

 

期刊: Applied Physics Letters  (AIP Available online 1986)
卷期: Volume 49, issue 19  

页码: 1263-1265

 

ISSN:0003-6951

 

年代: 1986

 

DOI:10.1063/1.97381

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We established that the contact resistance to the two‐dimensional electron gas (2DEG) in selectively dopedn‐AlGaAs/GaAs heterostructure is crystal orientation dependent. The contact resistance in the [011] direction is the lowest and that in the [01¯1] direction is the highest. The contact resistance monotonically changes between the [011] and [01¯1] directions. We also find the sheet resistance dependence of the contact resistance.

 

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