Investigation of orientation effect on contact resistance in selectively doped AlGaAs/GaAs heterostructures
作者:
M. Kamada,
T. Suzuki,
F. Nakamura,
Y. Mori,
M. Arai,
期刊:
Applied Physics Letters
(AIP Available online 1986)
卷期:
Volume 49,
issue 19
页码: 1263-1265
ISSN:0003-6951
年代: 1986
DOI:10.1063/1.97381
出版商: AIP
数据来源: AIP
摘要:
We established that the contact resistance to the two‐dimensional electron gas (2DEG) in selectively dopedn‐AlGaAs/GaAs heterostructure is crystal orientation dependent. The contact resistance in the [011] direction is the lowest and that in the [01¯1] direction is the highest. The contact resistance monotonically changes between the [011] and [01¯1] directions. We also find the sheet resistance dependence of the contact resistance.
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