100‐&mgr;m‐wide silicon‐on‐insulator structures by Si molecular beam epitaxy growth on porous silicon
作者:
T. L. Lin,
S. C. Chen,
Y. C. Kao,
K. L. Wang,
S. Iyer,
期刊:
Applied Physics Letters
(AIP Available online 1986)
卷期:
Volume 48,
issue 26
页码: 1793-1795
ISSN:0003-6951
年代: 1986
DOI:10.1063/1.96789
出版商: AIP
数据来源: AIP
摘要:
100‐&mgr;m silicon‐on‐insulator structures have been achieved by first utilizing silicon molecular beam epitaxial (Si MBE) growth on porous silicon and subsequently oxidizing the porous silicon through the patterned Si MBE film windows. A Si beam method is used for the low‐temperature surface cleaning of porous silicon prior to Si MBE growth. By using a two‐step growth technique, the Si MBE film shows good crystallinity checked by Rutherford backscattering channeling spectroscopy and cross‐sectional transmission electron microscopy. An electron mobility of 1300 cm2 V−1 s−1with a doping concentration of 6×1015cm−3has been achieved.
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