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Characterization of semi‐insulating liquid encapsulated Czochralski GaAs by cathodoluminescence

 

作者: B. Wakefield,   P. A. Leigh,   M. H. Lyons,   C. R. Elliott,  

 

期刊: Applied Physics Letters  （AIP Available online 1984）
卷期: Volume 45, issue 1  

页码: 66-68

 

ISSN:0003-6951

 

年代: 1984

 

DOI:10.1063/1.95013

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Characterization of semi‐insulating liquid encapsulated Czochralski GaAs by cathodoluminescence in a scanning electron microscope at liquid He temperatures has revealed that the main residual impurity, carbon, is not distributed homogeneously within the material. This may lead to nonuniformities in the electrical properties of the material.

 

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