High‐temperature kinetics of Si‐containing precursors for ceramic processing
作者:
D. Woiki,
L. Catoire,
P. Roth,
期刊:
AIChE Journal
(WILEY Available online 1997)
卷期:
Volume 43,
issue S11
页码: 2670-2678
ISSN:0001-1541
年代: 1997
DOI:10.1002/aic.690431311
出版商: American Institute of Chemical Engineers
数据来源: WILEY
摘要:
AbstractExperimental investigations of high‐temperature kinetics of Si‐precursor molecules relevant to CVD and ceramic processing are described. Reaction systems using SiH4, Si2H6, and SiCl4highly diluted in argon were studied in a shock tube, a high‐temperature wave reactor, by monitoring in situ the concentrations of atomic or radical reactants Si, H, Cl, SiH, and SiH2. Because of the very high dilution, the measured properties are sensitive to a limited number of elementary reactions, allowing a relatively direct determination of the respective rate coefficients. Both thermal pyrolysis and laser flash photolysis methods were used to expand the investigated temperature range. An overview of the bimolecular Si‐atom reactions i
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