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Atomic collision processes in sputtering

 

作者: I. Reid,   M.W. Thompson,   B.W. Farmery,  

 

期刊: Radiation Effects  （Taylor Available online 1980）
卷期: Volume 46, issue 3-4  

页码: 163-165

 

ISSN:0033-7579

 

年代: 1980

 

DOI:10.1080/00337578008209166

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

The time-of-flight spectra of sputtered atoms from gold crystals bombarded with 20 keV Ar+ions are reported. The discussion shows the effect of channelling, direct and once-deflected recoils from the surface and focused collisions along <110> and <100> directions.

 

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