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Thickness measurements of films on transparent substrates by photoelectric detection of interference fringes

 

作者: R. D. Pierce,   W. B. Venard,  

 

期刊: Review of Scientific Instruments  （AIP Available online 1974）
卷期: Volume 45, issue 1  

页码: 14-15

 

ISSN:0034-6748

 

年代: 1974

 

DOI:10.1063/1.1686436

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Apparatus for epitaxial film thickness measurement by photoelectric detection of interference fringes is described. The apparatus features high speed, immunity to noise from ambient light and the ability to distinguish between films grown on opposite sides of a transparent substrate, and is implemented with a minimum of components.

 

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