Automated calibration of the sample image using crystalline lattice for scale reference in scanning tunneling microscopy
作者:
Hideki Kawakatsu,
Hiroshi Kougami,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1996)
卷期:
Volume 14,
issue 1
页码: 11-14
ISSN:1071-1023
年代: 1996
DOI:10.1116/1.589038
出版商: American Vacuum Society
关键词: GRAPHITE;STM;CALIBRATION;IMAGE PROCESSING;SIGNAL−TO−NOISE RATIO;COMPUTER CODES;METROLOGY;graphite
数据来源: AIP
摘要:
This article describes the configuration and application of an image processing software developed for extracting periodic atomic features from scanning tunneling microscopy (STM) images. This was done with a view to calibrating the lateral and/or vertical scale of images acquired by a STM with two tunneling units, where a crystal can be used as the scale reference with one of the tunneling units. The image processing software was applied to consecutively acquired images of graphite with a size of 150×5 nm. The number of lattices automatically counted in a line scan of 150 nm, scanned in 400 ms, showed a matching of 99.95% from one image to the other. On the other hand, the matching in the feed direction, where image width was only 5 nm, but took 240 s, was 95%. As an example of application of the developed software, nonlinear movement of piezoscanners were readily monitored in the 100 nm order.
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