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High current Cu3P liquid metal ion source using a novel extractor configuration

 

作者: R. H. Higuchi‐Rusli,   J. C. Corelli,  

 

期刊: Applied Physics Letters  (AIP Available online 1987)
卷期: Volume 51, issue 25  

页码: 2170-2172

 

ISSN:0003-6951

 

年代: 1987

 

DOI:10.1063/1.98931

 

出版商: AIP

 

数据来源: AIP

 

摘要:

It has been found that by utilizing a sharp needle for the extractor electrode in close proximity to the source tip wetted with Cu3P liquid alloy, a large increase (factor ∼300) in ion current is observed in comparison to standard liquid metal ion sources (LMIS’s). In standard previously used LMIS’s the extractor electrode was a flat plane with a circular hole centered on the source needle tip. This new high current source has important applications in focused and broad ion beam deposition systems.

 

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