High current Cu3P liquid metal ion source using a novel extractor configuration
作者:
R. H. Higuchi‐Rusli,
J. C. Corelli,
期刊:
Applied Physics Letters
(AIP Available online 1987)
卷期:
Volume 51,
issue 25
页码: 2170-2172
ISSN:0003-6951
年代: 1987
DOI:10.1063/1.98931
出版商: AIP
数据来源: AIP
摘要:
It has been found that by utilizing a sharp needle for the extractor electrode in close proximity to the source tip wetted with Cu3P liquid alloy, a large increase (factor ∼300) in ion current is observed in comparison to standard liquid metal ion sources (LMIS’s). In standard previously used LMIS’s the extractor electrode was a flat plane with a circular hole centered on the source needle tip. This new high current source has important applications in focused and broad ion beam deposition systems.
点击下载:
PDF
(274KB)
返 回