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A miniature single element effusion cell for the vacuum deposition of transition-metal and rare-earth elements

 

作者: V. G. Harris,   N. C. Koon,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1997)
卷期: Volume 68, issue 8  

页码: 3168-3171

 

ISSN:0034-6748

 

年代: 1997

 

DOI:10.1063/1.1148262

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A miniature single element effusion cell has been fabricated and tested that allows for the high-vacuum deposition of a variety of transition-metal and rare-earth elements. The cell is designed to operate under high-vacuum conditions,≈10−9 Torr,with low power demands,<200 W.The virtues of this evaporator are the simplicity of design and ease of fabrication, assembly, maintenance, and operation.

 

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