A miniature single element effusion cell for the vacuum deposition of transition-metal and rare-earth elements
作者:
V. G. Harris,
N. C. Koon,
期刊:
Review of Scientific Instruments
(AIP Available online 1997)
卷期:
Volume 68,
issue 8
页码: 3168-3171
ISSN:0034-6748
年代: 1997
DOI:10.1063/1.1148262
出版商: AIP
数据来源: AIP
摘要:
A miniature single element effusion cell has been fabricated and tested that allows for the high-vacuum deposition of a variety of transition-metal and rare-earth elements. The cell is designed to operate under high-vacuum conditions,≈10−9 Torr,with low power demands,<200 W.The virtues of this evaporator are the simplicity of design and ease of fabrication, assembly, maintenance, and operation.
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