Doping effects in AlGaAs
作者:
M. Heiblum,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena
(AIP Available online 1985)
卷期:
Volume 3,
issue 3
页码: 820-822
ISSN:0734-211X
年代: 1985
DOI:10.1116/1.583110
出版商: American Vacuum Society
关键词: CRYSTAL DOPING;HETEROJUNCTIONS;SIMS;RHEED;SILICON;DOPED MATERIALS;ALUMINIUM ARSENIDES;GALLIUM ARSENIDES;PHOTOLUMINESCENCE;SEGREGATION;ATOM TRANSPORT;CARRIER MOBILITY;CV CHARACTERISTIC;HALL EFFECT;CHARGED−PARTICLE TRANSPORT;EXCITONS
数据来源: AIP
摘要:
A summary of the results of a few experiments on a variety of structures based on GaAs–AlGaAs heterojunctions, in which the AlGaAs was Si doped are reported. RHEED and SIMS results are presented for heavily and moderately doped AlGaAs, showing that Si segregated toward the growing front. Photoluminescence spectra of heavily doped AlGaAs has a dominant low energy peak and is absent of the exciton peak. Normal and inverted selectively doped structures were grown at a variety of conditions. Their properties demonstrate that Si segregates toward the growing front, and suggests that this effect could be the main cause of the low mobility in inverted structures.
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