Ferroelectric films of composition Pb1−xLax(ZryTi1−y)1−x/4)O3(x=0−0.07, y=0.4−0.6) have been prepared on Pt/Ti/SiO2/Si substrates using an alcohol based solgel process reacted at room temperature. FTIR, NMR, DTA, and SAXS measurements have been used to address the chemistry of the alkoxide-alcohol-water-acetylacetone system. Films having 10% lead excess, dried at 150°C, fired at 420°C and RTP processed (ramp rate 100°C/sec., 650°C for 60 sec.) crystallized in the perovskite phase and showed Ps, Prand Hcranging from 25–30μC/cm210–15 μC/cm2and 60–90 kV/cm, respectively. A model for variations in dielectric constant with porosity has been used to correlate these parameters with the solvent content of the sol.