Boron ion implantation inp‐type Hg0.8Cd0.2Te
作者:
R. Kumar,
M. B. Dutt,
R. Nath,
R. Chander,
S. C. Gupta,
期刊:
Journal of Applied Physics
(AIP Available online 1990)
卷期:
Volume 68,
issue 11
页码: 5564-5566
ISSN:0021-8979
年代: 1990
DOI:10.1063/1.347016
出版商: AIP
数据来源: AIP
摘要:
Differential Hall measurements at 77 K were done on 150‐keV boron implantedp‐type mercury‐cadmium‐telluride (HgCdTe).n+layers formed as a result of implantation with various doses were very sharp and thicknesses of then+layers were found to depend on boron dose. The sheet carrier concentration tends to saturate above the dose 1×1013cm−2.
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