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Time‐resolved electric‐field measurements in 30 kHz hydrogen discharges by optical emission Stark spectroscopy

 

作者: Jean‐Paul Booth,   Jacques Derouard,   Majida Fadlallah,   Nader Sadeghi,  

 

期刊: Journal of Applied Physics  (AIP Available online 1993)
卷期: Volume 74, issue 2  

页码: 862-867

 

ISSN:0021-8979

 

年代: 1993

 

DOI:10.1063/1.354878

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The temporal behavior of the cathode sheath in 30 kHz 0.4–1 Torr H2discharges has been investigated by optical emission spectroscopy. Analysis of the Stark splitting of plasma‐induced H Balmer delta emission was used to measure the electric field with spatial and temporal resolution in the instantaneous cathode sheath. The location of the plasma/sheath boundary was determined from the position of the maximum of the H2d 3&Pgr;u→a 3&Sgr;g+(0,0)Q1emission at 622.5 nm. Both methods showed that the sheath width increases as the cathode voltage becomes more negative, whereas the width remains constant as the applied voltage drops off. Analysis of the electric‐field profile provided information on the time evolution of the ion density close to the electrode during the cathode half‐cycle, in agreement with recent numerical calculations. At the beginning of the anodic half‐cycle an intense flash of plasma‐induced emission was observed, localized within 3 mm from the electrode.

 

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