Variations in metal thickness and surface roughness of sputter‐deposited Cr/Cu/Cr metals on aluminum ceramics and glass slides were measured. The copper layer, which has a thickness of 75 kÅ, shows the most uniform surface, while the base chrome layer with an average thickness of 750 Å shows the least. Etch rates were determined as a function of surface roughness for chromium using a KMnO4/NaOH etchant and for copper using a FeCl3etchant. The results for both metals show that the rate increases 2–3 times when the surface roughness is increased.