Characterization of (Ba0.5Sr0.5)TiO3thin films for ku-band phase shifters
作者:
CarlH. Mueller,
FredrickW. Van Keuls,
RobertR. Romanofsky,
FelixA. Miranda,
JosephD. Warner,
ChadwickL. Canedy,
Rammamoorthy Ramesh,
期刊:
Integrated Ferroelectrics
(Taylor Available online 2000)
卷期:
Volume 28,
issue 1-4
页码: 139-149
ISSN:1058-4587
年代: 2000
DOI:10.1080/10584580008222227
出版商: Taylor & Francis Group
关键词: ferroelectric;paraelectric;thin film;microstructure;phase shifter
数据来源: Taylor
摘要:
The microstructural properties of (Ba0.5Sr0.5)TiO3(BSTO) thin films (300, 700, and 1400 nm thick) deposited on LaAlO3(LAO) substrates were characterized using high-resolution x-ray diffractometery. Film crystallinity was the parameter that most directly influenced tunability, and we observed that a) the crystalline quality was highest in the thinnest film and progressively degraded with increasing film thickness; and b) strain at the film/substrate interface was completely relieved via dislocation formation. Paraelectric films such as BSTO offer an attractive means of incorporating low-cost phase shifter circuitry into beam-steerable reflectarray antennas.
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