首页   按字顺浏览 期刊浏览 卷期浏览 Combined millimeter-wave near-field microscope and capacitance distance control for the...
Combined millimeter-wave near-field microscope and capacitance distance control for the quantitative mapping of sheet resistance of conducting layers

 

作者: A. F. Lann,   M. Golosovsky,   D. Davidov,   A. Frenkel,  

 

期刊: Applied Physics Letters  (AIP Available online 1998)
卷期: Volume 73, issue 19  

页码: 2832-2834

 

ISSN:0003-6951

 

年代: 1998

 

DOI:10.1063/1.122605

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We present a dual-frequency electromagnetic scanning probe and apply it for quantitative mapping of the sheet resistance of conducting films. The high-frequency (82 GHz) mode is used for image acquisition, while the low-frequency (5 MHz) mode is used for distance control. We measure magnitude and phase of the near-field microwave reflectivity from conducting films of varying thickness and develop a model which accounts fairly well for our results. This brings us to a quantitative understanding of the contrast in the microwave near-field imaging using an aperture probe, and allows us to achieve quantitative contactless characterization of conducting layers with sheet resistance even below 2 &OHgr;. ©1998 American Institute of Physics.

 

点击下载:  PDF (87KB)



返 回