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Structural and Electrical Properties of Flash‐Evaporated Thin GaAs Films

 

作者: M. R. Farukhi,   E. J. Charlson,  

 

期刊: Journal of Applied Physics  (AIP Available online 1969)
卷期: Volume 40, issue 13  

页码: 5361-5367

 

ISSN:0021-8979

 

年代: 1969

 

DOI:10.1063/1.1657395

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A flash‐evaporation scheme modified to control the rate of the powder fed to the evaporator was used for depositing GaAs films on amorphous glass substrates. A bulk wurtzite form of GaAs was identified with x‐ray diffraction and found to have an axial ratio of 1.684. Periodic faulting induced by the plunger movement of the powder feeder is believed to cause the formation of this phase. Structural analysis of the flash evaporated films was performed using a Fourier line broadening analysis and integral breadth measurements. A least‐squares approximation of the ``Warren‐Averbach'' method yielded particle sizes of 125 Å and rms microstrains of 0.0018. The films were doped during growth with germanium, indium and tin. Germanium doping producedp‐type films while both indium and tin doping producedn‐type. Mobilities greater than 0.5 cm2/V·sec were found for a narrow range of doping (1018−1019/cm3) for the tin doped films. The films grown with no auxiliary dopant werep‐type with carrier concentrations exceeding 1019/cm3and mobilities near 0.01 cm2/V·sec.

 

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