We developed a piezoelectric scanner for probe microscopes that uses only single‐domain LiNbO3crystals as a piezoelectric transducer material in order to avoid nonlinearity, hysteresis, and creep that is always present in piezoelectric ceramics. A raster area of about 50×50 nm2is within reach of a scanner that uses three double‐plate translators and a scanning voltage of 300 V peak to peak. The performance of monocrystal scanners for investigations in the range of atomic resolution is demonstrated by imaging the well‐known surface of highly oriented pyrolytic graphite.