This work demonstrates that the technique of guiding atoms through hollow optical fiber escorted by evanescent light is useful as a novel scheme of optical atom deposition. To show the feasibility of fabricating micron-sized structures with nanometric depth on a substrate, we measure the spatial distribution of the guided atom flux with a hot-wire detector. Moreover, precise control of the deposition rate is illustrated with a 1.4-&mgr;m-hollow fiber via photoionization spectroscopy. The ratio of the guided atom flux relative to the background transmission is enhanced up to 80-fold with a slightly tilted hollow fiber. ©1997 American Institute of Physics.