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Depth Profile Analysis of New Materials in Hollow Cathode Discharge

 

作者: R. Djulgerova,   V. Mihailov,   V. Gencheva,   L. Popova,   B. Panchev,   V. Michaylova,   A. Szytula,   L. Gondek,   T. Dohnalik,   Z. Lj. Petrovic,  

 

期刊: AIP Conference Proceedings  （AIP Available online 1904）
卷期: Volume 740, issue 1  

页码: 373-384

 

ISSN:0094-243X

 

年代: 1904

 

DOI:10.1063/1.1843521

 

出版商: AIP

 

数据来源: AIP

 

摘要:

In this review the possibility of hollow cathode discharge for depth profile analysis is demonstrated for several new materials: planar optical waveguides fabricated by Ag+‐Na+ion exchange process in glasses, SnO2thin films for gas sensors modified by hexamethildisilazane after rapid thermal annealing, W‐ and WC‐ CVD layers deposited on Co‐metalloceramics and WO3‐ CVD thin films deposited on glass. The results are compared with different standard techniques. © 2004 American Institute of Physics

 

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